Jobin-Yvon Variable Angle Spectroscopic Ellipsometer

This equipment was purchased under the "Programa Nacional de Re-equipamento Científico da Fundação para a Ciência e a Tecnologia (project REEQ/293/CTM/ 2005)"

The Ellipsometer Laboratory is an IST/ICEMS infrastructure aimed at research and development in the area of materials engineering.
The laboratory is open to all research centers, both from IST and other Universities, public and private institutions as well as industry.
The ellipsometer is capable of measuring both the thickness and refractive index of films ~ 1- 1000 nm in thickness, throughout a continuous range of wavelengths between ~ 260 – 1700 nm. This instrument is capable of measuring the index and thickness not only of single layer films deposited on a suitable substrate, but also of multilayer film structures (yielding the index and thickness of each layer, through suitable modelling and fitting procedures), as well as bulk samples.


To use this facility please contact